| Kode# | 525-020D |
|---|---|
| Meja Kerja Granit | (310*220) mm |
| Meja Kerja Kaca | (179,5*129,5) mm |
| Perjalanan sumbu X/Y | (150*100) mm |
| Perjalanan sumbu Z | 100mm |
| Kode# | 525-320H |
|---|---|
| Meja Kerja Marmer | (605*450) mm |
| Meja Kerja Kaca | (456*348) mm |
| Perjalanan sumbu X/Y | (400*300)mm |
| Perjalanan sumbu Z | 200 mm |
| Kode# | 524-220H |
|---|---|
| Perjalanan Sumbu X/Y | (400*300)mm |
| Perjalanan Sumbu Z | 200 mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Kemungkinan diulang | 2um |
| Kode# | 524-120H |
|---|---|
| Perjalanan Sumbu X/Y | (400*300)mm |
| Perjalanan Sumbu Z | 200 mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Kemungkinan diulang | 2um |
| Kode# | 529-120j |
|---|---|
| Perjalanan Sumbu X/Y | (500*400) mm |
| Perjalanan Sumbu Z | 200 mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Akurasi Sumbu XY | ≤3,0+L/200(um) |
| Code# | 525-020DP |
|---|---|
| Granite Stage | (310*220) mm |
| Glass Stage | (179.5*129.5) mm |
| X/Y Axis Travel | (150*100) mm |
| Linear Scales | Resolution: 0.5um |
| Kode# | 525-120H |
|---|---|
| Meja Kerja Marmer | (605*450) mm |
| Meja Kerja Kaca | (456*348) mm |
| Perjalanan sumbu X/Y | (400*300)mm |
| Perjalanan sumbu Z | 200 mm |
| Kode# | 525-120G |
|---|---|
| Meja Kerja Marmer | (505*350) mm |
| Meja Kerja Kaca | (356*248) mm |
| Perjalanan sumbu X/Y | (300*200) mm |
| Perjalanan sumbu Z | 200 mm |
| Kode# | 525-020D |
|---|---|
| Meja Kerja Granit | (310*220) mm |
| Meja Kerja Kaca | (179,5*129,5) mm |
| Perjalanan sumbu X/Y | (150*100) mm |
| Perjalanan sumbu Z | 100mm |
| Kode# | 529-120H |
|---|---|
| Perjalanan Sumbu X/Y | (400*300)mm |
| Perjalanan Sumbu Z | 200 mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Akurasi Sumbu XY | ≤3,0+L/200(um) |