| Kode# | 512-400 |
|---|---|
| Ukuran Tahap Kerja | Ukuran 455x126mm |
| Tahap Kerja Perjalanan | 300x150mm |
| Fokus | 120MM |
| Keakuratan | ≤3+L/200(um) |
| Kode# | 512-400 |
|---|---|
| Ukuran Tahap Kerja | Ukuran 455x126mm |
| Tahap Kerja Perjalanan | 300x150mm |
| Fokus | 120MM |
| Keakuratan | ≤3+L/200(um) |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Kode# | Nomor telepon 511-410 |
|---|---|
| Ukuran Panggung Logam | Ukuran 308x408mm |
| Ukuran Panggung Kaca | Ukuran 198x306mm |
| Rentang Perjalanan Panggung | 200x100mm |
| Dimensi produk | Ukuran: 1003x617x1309mm |
| Kode# | 525-020P |
|---|---|
| Panggung Granit | (310*220) mm |
| Panggung Kaca | (179,5*129,5) mm |
| Perjalanan sumbu X/Y | (150*100) mm |
| Skala Linier X/Y | Resolusi: 0,5um |
| Kode# | 511-330 |
|---|---|
| Ukuran Panggung Logam | Ukuran 258x308mm |
| Ukuran Panggung Kaca | 148x206mm |
| Rentang Perjalanan Panggung | Ukuran 150x100mm |
| Dimensi produk | Ukuran 988x563x1157mm |
| Kode# | 510-340 |
|---|---|
| Ukuran Layar LCD | Ukuran 115mm x 85mm |
| Resolusi Layar LCD | 640*480 |
| Poros Tampilan | 3 sumbu (X,Y,Z/Q) |
| Resolusi Skala Linear | 0,1um, 0,2um, 0,5um, 1um, 2um, 5um |
| Code# | 525-020GP |
|---|---|
| Granite Stage | (505*350)mm |
| Glass Stage | (356*248)mm |
| X/Y Axis Travel | (300*200)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 525-020EP |
|---|---|
| Granite Stage | (390*220)mm |
| Glass Stage | (229.5*129.5)mm |
| X/Y Axis Travel | (200*100)mm |
| Linear Scales | Resolution: 0.5um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |