| Kode# | 525-120H |
|---|---|
| Meja Kerja Marmer | (605*450) mm |
| Meja Kerja Kaca | (456*348) mm |
| Perjalanan X/Y Axis | (400*300)mm |
| Z Axis Travel | 200mm |
| Kode# | 525-020D |
|---|---|
| Meja Kerja Granit | (310*220) mm |
| Meja Kerja Kaca | (179,5*129,5) mm |
| Perjalanan X/Y Axis | (150*100) mm |
| Z Axis Travel | 100mm |
| Vimea322A | 524-220G |
|---|---|
| Perjalanan Sumbu X/Y | (300*200) mm |
| Perjalanan Sumbu Z | 200mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Pengulangan | 2um |
| Kode# | 500-200 |
|---|---|
| Bidang Pandang | Panjang 190 x Lebar 127 x Panjang 229 mm |
| Mode gerakan sumbu Z | otomatis |
| Pembesaran lensa telesentrik bilateral | Besaran 0,069X |
| Kedalaman bidang | 10mm |
| Kode# | 525-320H |
|---|---|
| Meja Kerja Marmer | (605*450) mm |
| Meja Kerja Kaca | (456*348) mm |
| Perjalanan X/Y Axis | (400*300)mm |
| Z Axis Travel | 200mm |
| Kode# | 525-020D |
|---|---|
| Meja Kerja Granit | (310*220) mm |
| Meja Kerja Kaca | (179,5*129,5) mm |
| Perjalanan X/Y Axis | (150*100) mm |
| Z Axis Travel | 100mm |
| Vimea322A | 524-120G |
|---|---|
| Perjalanan Sumbu X/Y | (300*200) mm |
| Perjalanan Sumbu Z | 200mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Pengulangan | 2um |
| Kode# | 522-120G |
|---|---|
| Perjalanan Sumbu X/Y | (300*200) mm |
| Perjalanan Sumbu Z | 200mm |
| Skala linier sumbu X/Y/Z | 0,5um |
| Akurasi Sumbu XY | ≤2,0+L/200(um) |
| Kode# | 521-420J |
|---|---|
| Meja Kerja Marmer | (650*580) mm |
| Meja Kerja Kaca | (540*440) mm |
| Perjalanan Sumbu X/Y | (500*400) mm |
| Perjalanan Sumbu Z | Jarak tempuh efektif 200mm |
| Kode# | 522-420G |
|---|---|
| Perjalanan Sumbu X/Y | (300*200) mm |
| Perjalanan Sumbu Z | 200mm |
| Skala linier sumbu X/Y/Z | 0,5um |
| Akurasi Sumbu XY | ≤2,0+L/200(um) |