| Code# | 525-020EP |
|---|---|
| Granite Stage | (390*220)mm |
| Glass Stage | (229.5*129.5)mm |
| X/Y Axis Travel | (200*100)mm |
| Linear Scales | Resolution: 0.5um |
| Kode# | 502-120G |
|---|---|
| Perjalanan Sumbu X/Y | (300*200) mm |
| Dimensi (WxDxH) | (1237*740*1664)mm |
| Berat badan | 380Kg |
| Perjalanan Sumbu Z | 200 mm |
| Kode# | 529-120g |
|---|---|
| Perjalanan Sumbu X/Y | (300*200) mm |
| Perjalanan Sumbu Z | 200 mm |
| Skala Linier 3 Sumbu X/Y/Z (mm) | Resolusi: 0,5um |
| Akurasi Sumbu XY | ≤2,5+L/200(um) |