| Kode# | 525-020dp |
|---|---|
| Panggung granit | (310*220) mm |
| Panggung kaca | (179.5*129.5) mm |
| Perjalanan X/Y Axis | (150*100) mm |
| Skala linier | Resolusi: 0,5um |
| Kode# | 525-020P |
|---|---|
| Panggung granit | (310*220) mm |
| Panggung kaca | (179.5*129.5) mm |
| Perjalanan X/Y Axis | (150*100) mm |
| Skala Linier X/Y | Resolusi: 0,5um |
| Kode# | 512-350 |
|---|---|
| Ukuran Tahap Kerja | Ukuran 355x126mm |
| Perjalanan Tahap Kerja | 200x100mm |
| Fokus | 90mm |
| Ketepatan | ≤3+L/200(um) |
| Kode# | 542-310 |
|---|---|
| Perjalanan Tahap Kerja | 355x125mm |
| Perjalanan X/Y-Axis | 200x120mm |
| Sumbu z | 110mm |
| Akurasi Pengukuran | ≤3+l/200um |
| Kode# | 542-310 |
|---|---|
| Perjalanan Tahap Kerja | 355x125mm |
| Perjalanan X/Y-Axis | 200x120mm |
| Sumbu z | 110mm |
| Akurasi Pengukuran | ≤3+l/200um |